JPS60227461A - 半導体集積回路装置 - Google Patents
半導体集積回路装置Info
- Publication number
- JPS60227461A JPS60227461A JP59079683A JP7968384A JPS60227461A JP S60227461 A JPS60227461 A JP S60227461A JP 59079683 A JP59079683 A JP 59079683A JP 7968384 A JP7968384 A JP 7968384A JP S60227461 A JPS60227461 A JP S60227461A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- groove
- sio2
- shaped
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 25
- 238000004519 manufacturing process Methods 0.000 title description 6
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000010409 thin film Substances 0.000 claims description 49
- 238000009792 diffusion process Methods 0.000 claims description 19
- 239000004020 conductor Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 45
- 238000000034 method Methods 0.000 abstract description 14
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 7
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 5
- 229910052681 coesite Inorganic materials 0.000 abstract 9
- 229910052906 cristobalite Inorganic materials 0.000 abstract 9
- 239000000377 silicon dioxide Substances 0.000 abstract 9
- 235000012239 silicon dioxide Nutrition 0.000 abstract 9
- 229910052682 stishovite Inorganic materials 0.000 abstract 9
- 229910052905 tridymite Inorganic materials 0.000 abstract 9
- 238000010438 heat treatment Methods 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 42
- 229910052710 silicon Inorganic materials 0.000 description 42
- 239000010703 silicon Substances 0.000 description 42
- 239000010408 film Substances 0.000 description 40
- 229910052814 silicon oxide Inorganic materials 0.000 description 27
- 239000010410 layer Substances 0.000 description 20
- 239000003990 capacitor Substances 0.000 description 18
- 238000001020 plasma etching Methods 0.000 description 11
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 10
- 239000012212 insulator Substances 0.000 description 7
- 238000002955 isolation Methods 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 238000005530 etching Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 241000293849 Cordylanthus Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- -1 boron ions Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/743—Making of internal connections, substrate contacts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
- H10B12/373—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate the capacitor extending under or around the transistor
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59079683A JPS60227461A (ja) | 1984-04-19 | 1984-04-19 | 半導体集積回路装置 |
| DE8585302116T DE3565339D1 (en) | 1984-04-19 | 1985-03-26 | Semiconductor memory device and method of manufacturing the same |
| EP85302116A EP0164829B1 (en) | 1984-04-19 | 1985-03-26 | Semiconductor memory device and method of manufacturing the same |
| US07/110,616 US4786954A (en) | 1984-04-19 | 1987-10-19 | Dynamic ram cell with trench surrounded switching element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59079683A JPS60227461A (ja) | 1984-04-19 | 1984-04-19 | 半導体集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60227461A true JPS60227461A (ja) | 1985-11-12 |
| JPH0336309B2 JPH0336309B2 (en]) | 1991-05-31 |
Family
ID=13696998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59079683A Granted JPS60227461A (ja) | 1984-04-19 | 1984-04-19 | 半導体集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60227461A (en]) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6187358A (ja) * | 1984-10-05 | 1986-05-02 | Nec Corp | 半導体記憶装置およびその製造方法 |
| JPS61108163A (ja) * | 1984-11-01 | 1986-05-26 | Nec Corp | 半導体記憶装置の製造方法 |
| JPS62145864A (ja) * | 1985-12-20 | 1987-06-29 | Nec Corp | ダイナミツク型半導体記憶装置の記憶素子構造および製造方法 |
| JPS63228742A (ja) * | 1987-03-06 | 1988-09-22 | シ−メンス、アクチエンゲゼルシヤフト | ３次元１トランジスタメモリセル構造とその製法 |
| JPS645052A (en) * | 1987-06-29 | 1989-01-10 | Mitsubishi Electric Corp | Capacitor cell of semiconductor storage device |
-
1984
- 1984-04-19 JP JP59079683A patent/JPS60227461A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6187358A (ja) * | 1984-10-05 | 1986-05-02 | Nec Corp | 半導体記憶装置およびその製造方法 |
| JPS61108163A (ja) * | 1984-11-01 | 1986-05-26 | Nec Corp | 半導体記憶装置の製造方法 |
| JPS62145864A (ja) * | 1985-12-20 | 1987-06-29 | Nec Corp | ダイナミツク型半導体記憶装置の記憶素子構造および製造方法 |
| JPS63228742A (ja) * | 1987-03-06 | 1988-09-22 | シ−メンス、アクチエンゲゼルシヤフト | ３次元１トランジスタメモリセル構造とその製法 |
| JPS645052A (en) * | 1987-06-29 | 1989-01-10 | Mitsubishi Electric Corp | Capacitor cell of semiconductor storage device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0336309B2 (en]) | 1991-05-31 |
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